Precise and smooth structure on InP fabricated by femtosecond laser direct writing-assisted wet etching
| Autor: | Zhu, Jingyuan, Li, Qiankun, Chen, Qidai, Liu, Boshen, Wei, Zhipeng |
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| Zdroj: | In Optics and Laser Technology September 2024 176 |
| Databáze: | ScienceDirect |
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