Peripheral-photoinhibition-based direct laser writing with isotropic 30 nm feature size using a pseudo 3D hollow focus
| Autor: | Qiu, Yiwei, Ding, Chenliang, Zhan, Gangyao, Luo, Mengdi, Wen, Jisen, Tang, Mengbo, Cao, Chun, Liu, Wenjie, Xu, Liang, Lv, Bihu, Zhu, Dazhao, Kuang, Cuifang, Liu, Xu |
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| Zdroj: | In Optics and Laser Technology March 2024 170 |
| Databáze: | ScienceDirect |
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