High-quality micro/nano structures of 4H-SiC patterning by vector femtosecond laser
| Autor: | Dong, Bing, Xu, Zongwei, Shi, Changkun, Zhang, Kun, Zhang, Yuheng, Hua, Rushuai, Zhao, Wei, Wang, Jianshi |
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| Zdroj: | In Optics and Laser Technology August 2023 163 |
| Databáze: | ScienceDirect |
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