Single-shot selective femtosecond and picosecond infrared laser crystallization of an amorphous Ge/Si multilayer stack
| Autor: | Volodin, V.A., Cheng, Yuzhu, Bulgakov, A.V., Levy, Y., Beránek, J., Nagisetty, S.S., Zukerstein, M., Popov, A.A., Bulgakova, N.M. |
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| Zdroj: | In Optics and Laser Technology June 2023 161 |
| Databáze: | ScienceDirect |
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