Analysis of stresses and shape changes in thin substrates with stressed film patterning using femtosecond laser micromachining
| Autor: | Zuo, Heng E., Heilmann, Ralf K., Schattenburg, Mark L. |
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| Zdroj: | In Optics and Laser Technology February 2023 158 Part A |
| Databáze: | ScienceDirect |
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