Stealth dicing of sapphire sheets with low surface roughness, zero kerf width, debris/crack-free and zero taper using a femtosecond Bessel beam
| Autor: | Li, Zhaoqing, Wang, Xuefeng, Wang, Junlong, Allegre, Olivier, Guo, Wei, Gao, Wenyan, Jia, Nan, Li, Lin |
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| Zdroj: | In Optics and Laser Technology March 2021 135 |
| Databáze: | ScienceDirect |
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