Structural investigation of nanovoids around the interface of micro-vias by spherical aberration corrected scanning transmission electron microscopy
| Autor: | Hsieh, M.C., Nishijima, M., Jogo, K., Zhang, Z., Okumuara, R., Yoshida, H., Chen, C., Suetake, A., Honma, H., Seto, H., Kitahara, Y., Kita, K., Suganuma, K. |
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| Zdroj: | In Microelectronics Reliability November 2023 150 |
| Databáze: | ScienceDirect |
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