Prediction of the drift trend in piezoelectrically actuated MEMS mirror by 2D reliability modelling
| Autor: | Manzotti, Matteo, Rezvani, Zahra, Pedaci, Immacolata, Barbato, Paola Sabrina, Balsamo, Amalia, Losa, Stefano, Casuscelli, Valeria |
|---|---|
| Zdroj: | In Microelectronics Reliability November 2023 150 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect