Total ionizing dose radiation hardening technology based on double-charge multiple-step ion implantation
| Autor: | Jianwei, Wu, Zongguang, Yu, Genshen, Hong, Zhiqiang, Xiao, Jing, Luo |
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| Zdroj: | In Microelectronics Reliability March 2023 142 |
| Databáze: | ScienceDirect |
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