A piezoelectric MEMS loudspeaker for in-ear and free field applications lumped and finite element models

Autor: Liechti, Romain, Durand, Stéphane, Hilt, Thierry, Casset, Fabrice, Dieppedale, Christel, Verdot, Thierry, Colin, Mikaël
Zdroj: In Microelectronics Reliability July 2022 134
Databáze: ScienceDirect