A piezoelectric MEMS loudspeaker for in-ear and free field applications lumped and finite element models
Autor: | Liechti, Romain, Durand, Stéphane, Hilt, Thierry, Casset, Fabrice, Dieppedale, Christel, Verdot, Thierry, Colin, Mikaël |
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Zdroj: | In Microelectronics Reliability July 2022 134 |
Databáze: | ScienceDirect |
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