Carbon ion implantation as healing strategy for improved reliability in phase-change memory arrays
| Autor: | Bourgeois, G. ⁎, Meli, V., Al Mamun, F., Mazen, F., Nolot, E., Martinez, E., Barnes, J.-P., Bernier, N., Jannaud, A., Laulagnet, F., Hemard, B., Castellani, N., Bernard, M., Sabbione, C., Milesi, F., Magis, T., Socquet-Clerc, C., Coig, M., Garrione, J., Cyrille, M.-C., Charpin, C., Navarro, G. ⁎, Andrieu, F. |
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| Zdroj: | In Microelectronics Reliability November 2021 126 |
| Databáze: | ScienceDirect |
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