A study of hopping transport during discharging in SiNx films for MEMS capacitive switches
| Autor: | Birmpiliotis, D., Koutsoureli, M., Stavrinidis, G., Konstantinidis, G., Papaioannou, G. |
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| Zdroj: | In Microelectronics Reliability November 2020 114 |
| Databáze: | ScienceDirect |
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