A comparative study of nanostructured Silicon-Nitride electrical properties for potential application in RF-MEMS capacitive switches
| Autor: | Birmpiliotis, D., Stavrinidis, G., Koutsoureli, M., Konstantinidis, G., Papaioannou, G., Ziaei, A. |
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| Zdroj: | In Microelectronics Reliability September 2019 100-101 |
| Databáze: | ScienceDirect |
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