Numerical study on the self-heating effects for vacuum/high-k gate dielectric tri-gate FinFETs
| Autor: | Zhang, Guohe, Lai, Junhua, Zhu, Shengli, Wei, Sufen, Liang, Feng, Yang, Cheng-Fu |
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| Zdroj: | In Microelectronics Reliability April 2019 95:52-57 |
| Databáze: | ScienceDirect |
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