Contactless parametric characterization of bandgap engineering in p-type FinFETs using spectral photon emission
| Autor: | Beyreuther, A., Vogt, I., Herfurth, N., Nakamura, T., Fischer, G.G., Motamedi, B., Boit, C. |
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| Zdroj: | In Microelectronics Reliability January 2019 92:143-148 |
| Databáze: | ScienceDirect |
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