Reliability assessment and failure mode analysis of MEMS accelerometers for space applications

Autor: Marozau, I., Auchlin, M., Pejchal, V., Souchon, F., Vogel, D., Lahti, M., Saillen, N., Sereda, O.
Zdroj: In Microelectronics Reliability September 2018 88-90:846-854
Databáze: ScienceDirect