Cross-sectional nanoprobing sample preparation on sub-micron device with fast laser grooving technique

Autor: Tan, P.K., Zhao, Y.Z., Rivai, F., Liu, B.H., Pan, Y.L., He, R., Tan, H., Mai, Z.H.
Zdroj: In Microelectronics Reliability September 2018 88-90:309-314
Databáze: ScienceDirect
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