Electrical properties of SiNx films with embedded CNTs for MEMS capacitive switches
| Autor: | Koutsoureli, M., Stavrinidis, G., Birmpiliotis, D., Konstantinidis, G., Papaioannou, G. |
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| Zdroj: | In Microelectronics Reliability September 2017 76-77:614-618 |
| Databáze: | ScienceDirect |
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