Phase separation-suppressed and strain-modulated improvement of crystalline quality of AlGaN epitaxial layer grown by MOCVD
| Autor: | Luong, Tien Tung, Ho, Yen-Teng, Wong, Yuen-Yee, Chang, Shane, Chang, Edward-Yi |
|---|---|
| Zdroj: | In Microelectronics Reliability April 2018 83:286-292 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect