Static fault localization of subtle metallization defects using near infrared photon emission microscopy
| Autor: | Quah, A.C.T., Nagalingam, D., Moon, S., Susanto, E., Ang, G.B., Neo, S.P., Lam, J.C., Mai, Z.H. |
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| Zdroj: | In Microelectronics Reliability June 2017 73:76-91 |
| Databáze: | ScienceDirect |
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