Application of high frequency scanning acoustic microscopy for the failure analysis and reliability assessment of MEMS sensors
| Autor: | Oberhoff, S., Goetz, K., Trojan, K., Zoeller, M., Glueck, J. |
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| Zdroj: | In Microelectronics Reliability September 2016 64:656-659 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect