Cross-sectional nanoprobing fault isolation technique on submicron devices
| Autor: | Tan, P.K., Yap, H.H., Chen, C.Q., Rivai, F., Zhao, Y.Z., Zhu, L., Feng, H., Tan, H., He, R., Wang, D.D., Huang, Y.M., Ma, Y.Z., Lam, J., Mai, Z.H. |
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| Zdroj: | In Microelectronics Reliability September 2016 64:321-325 |
| Databáze: | ScienceDirect |
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