Electrical analysis on implantation-related defect by nanoprobing methodology
| Autor: | Chen, C.Q., Ng, P.T., Ang, G.B., T an, H., Rivai, Francis, Ma, Y.Z., Ng, H.P., Lam, Jeffery, Mai, Z.H. |
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| Zdroj: | In Microelectronics Reliability September 2016 64:317-320 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect