Application of Fast Laser Deprocessing Techniques on large cross-sectional view area sample with FIB-SEM dual beam system
| Autor: | Zhao, Y.Z., Wang, Q.J., Tan, P.K., Yap, H.H., Liu, B.H., Feng, H., Tan, H., He, R., Huang, Y.M., Wang, D.D., Zhu, L., Chen, C.Q., Rivai, F., Lam, J., Mai, Z.H. |
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| Zdroj: | In Microelectronics Reliability September 2016 64:362-366 |
| Databáze: | ScienceDirect |
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