Robust design of thermo-mechanical MEMS switch embedded in aluminium BEOL interconnect
| Autor: | Orellana, S., Arrazat, B., Fornara, P., Rivero, C., Blayac, S., Montmitonnet, P., Inal, K. |
|---|---|
| Zdroj: | In Microelectronics Reliability August-September 2015 55(9-10):1896-1900 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect