2 MeV electron irradiation effects on the electrical characteristics of MOS capacitors with ALD Al2O3 dielectrics of different thickness
| Autor: | Rafí, J.M., González, M.B., Takakura, K., Tsunoda, I., Yoneoka, M., Beldarrain, O., Zabala, M., Campabadal, F. |
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| Zdroj: | In Microelectronics Reliability September-November 2013 53(9-11):1333-1337 |
| Databáze: | ScienceDirect |
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