Voltage and current stress induced variations in TiN/HfSixOy/TiN MIM capacitors
| Autor: | Misra, D., Kasinath, Jyothi, Chandorkar, Arun N. |
|---|---|
| Zdroj: | In Microelectronics Reliability February 2013 53(2):270-273 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Misra, D., Kasinath, Jyothi, Chandorkar, Arun N. |
|---|---|
| Zdroj: | In Microelectronics Reliability February 2013 53(2):270-273 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect