Contact degradation due to material transfer in MEM switches
| Autor: | Peschot, A., Poulain, C., Souchon, F., Charvet, P.-L., Bonifaci, N., Lesaint, O. |
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| Zdroj: | In Microelectronics Reliability September-October 2012 52(9-10):2261-2266 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect