Characterization of fatigued Al lines by means of SThM and XRD: Analysis using fast Fourier transform
| Autor: | Szeloch, R.F., Janus, P., Serafińczuk, J., Szecówka, P.M., Jóźwiak, G. |
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| Zdroj: | In Microelectronics Reliability April 2012 52(4):711-717 |
| Databáze: | ScienceDirect |
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