The effect of nano-scale interaction forces on the premature pull-in of real-life Micro-Electro-Mechanical Systems
| Autor: | Ardito, R., Frangi, A., Corigliano, A., De Masi, B., Cazzaniga, G. |
|---|---|
| Zdroj: | In Microelectronics Reliability 2012 52(1):271-281 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect