Chromatic and spherical aberration correction for silicon aplanatic solid immersion lens for fault isolation and photon emission microscopy of integrated circuits
| Autor: | Goldberg, B.B., Yurt, A., Lu, Y., Ramsay, E., Köklü, F.H., Mertz, J., Bifano, T.G., Ünlü, M.S. |
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| Zdroj: | In Microelectronics Reliability September-November 2011 51(9-11):1637-1639 |
| Databáze: | ScienceDirect |
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