Back-end soft and hard defect monitoring using a single test chip
| Autor: | Rigaud, Fabrice, Portal, Jean-Michel, Aziza, Hassen, Nee, Didier, Vast, Julien, Argoud, Fabrice, Borot, Bertrand |
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| Zdroj: | In Microelectronics Reliability 2011 51(6):1136-1141 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect