MEMS technology integrated in the CMOS back end
| Autor: | Gaddi, R., Van Kampen, R., Unamuno, A., Joshi, V., Lacey, D., Renault, M., Smith, C., Knipe, R., Yost, D. |
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| Zdroj: | In Microelectronics Reliability 2010 50(9):1593-1598 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect