Laser THz emission microscope as a novel tool for LSI failure analysis
| Autor: | Yamashita, Masatsugu, Otani, Chiko, Kim, Sunmi, Murakami, Hironaru, Tonouchi, Masayoshi, Matsumoto, Toru, Midoh, Yoshihiro, Miura, Katsuyoshi, Nakamae, Koji, Nikawa, Kiyoshi |
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| Zdroj: | In Microelectronics Reliability 2009 49(9):1116-1126 |
| Databáze: | ScienceDirect |
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