Dielectric thinning model applied to metal insulator metal capacitors with Al 2O 3 dielectric
| Autor: | Allers, K.H., Böck, J., Boguth, S., Goller, K., Knapp, H., Lachner, R. |
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| Zdroj: | In Microelectronics Reliability 2009 49(12):1520-1528 |
| Databáze: | ScienceDirect |
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