ESD failure signature in capacitive RF MEMS switches

Autor: Ruan, J., Papaioannou, G.J., Nolhier, N., Mauran, N., Bafleur, M., Coccetti, F., Plana, R.
Zdroj: In Microelectronics Reliability 2008 48(8):1237-1240
Databáze: ScienceDirect