Microsystems elements based on free-standing thick-films made with a new sacrificial layer process
| Autor: | Lucat, Claude, Ginet, Patrick, Castille, Christophe, Debéda, Hélène, Ménil, Francis |
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| Zdroj: | In Microelectronics Reliability 2008 48(6):872-875 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect