Electrostatic discharge failure analysis of capacitive RF MEMS switches
| Autor: | Ruan, J., Nolhier, N., Bafleur, M., Bary, L., Coccetti, F., Lisec, T., Plana, R. |
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| Zdroj: | In Microelectronics Reliability 2007 47(9):1818-1822 |
| Databáze: | ScienceDirect |
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