Backside interferometric methods for localization of ESD-induced leakage current and metal shorts
| Autor: | Dubec, V., Bychikhin, S., Pogany, D., Gornik, E., Brodbeck, T., Stadler, W. |
|---|---|
| Zdroj: | In Microelectronics Reliability 2007 47(9):1539-1544 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect