Silicon oxynitride integrated waveguide for on-chip optical interconnects applications
Autor: | Wong, C.K., Wong, H., Chan, M., Chow, Y.T., Chan, H.P. |
---|---|
Zdroj: | In Microelectronics Reliability 2008 48(2):212-218 |
Databáze: | ScienceDirect |
Externí odkaz: |