Correlation between infrared transmission spectra and the interface trap density of SiO 2 films

Autor: Vamvakas, V.Em., Theodoropoulou, M., Georga, S.N., Krontiras, C.A., Pisanias, M.N.
Zdroj: In Microelectronics Reliability 2007 47(4):834-837
Databáze: ScienceDirect