Parameters extraction of hafnium based gate oxide capacitors
| Autor: | Nguyen, T., Busseret, C., Militaru, L., Poncet, A., Aimé, D., Baboux, N., Plossu, C. |
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| Zdroj: | In Microelectronics Reliability 2007 47(4):729-732 |
| Databáze: | ScienceDirect |
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| Autor: | Nguyen, T., Busseret, C., Militaru, L., Poncet, A., Aimé, D., Baboux, N., Plossu, C. |
|---|---|
| Zdroj: | In Microelectronics Reliability 2007 47(4):729-732 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect