VSP – A gate stack analyzer

Autor: Karner, M., Gehring, A., Wagner, M., Entner, R., Holzer, S., Goes, W., Vasicek, M., Grasser, T., Kosina, H., Selberherr, S.
Zdroj: In Microelectronics Reliability 2007 47(4):704-708
Databáze: ScienceDirect