Characterisation of the Al 2O 3 films deposited by ultrasonic spray pyrolysis and atomic layer deposition methods for passivation of 4H–SiC devices
| Autor: | Wolborski, Maciej, Bakowski, Mietek, Ortiz, Armando, Pore, Viljami, Schöner, Adolf, Ritala, Mikko, Leskelä, Markku, Hallén, Anders |
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| Zdroj: | In Microelectronics Reliability 2006 46(5):743-755 |
| Databáze: | ScienceDirect |
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