Electrical properties in low temperature range (5 K–300 K) of Tantalum Oxide dielectric MIM capacitors
| Autor: | Deloffre, E., Montès, L., Ghibaudo, G., Bruyère, S., Blonkowski, S., Bécu, S., Gros-Jean, M., Crémer, S. |
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| Zdroj: | In Microelectronics Reliability 2005 45(5):925-928 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect