Light emission from Si/SiO 2 superlattices fabricated by RPECVD
| Autor: | Rölver, R. ⁎, Winkler, O., Först, M., Spangenberg, B., Kurz, H. |
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| Zdroj: | In Microelectronics Reliability 2005 45(5):915-918 |
| Databáze: | ScienceDirect |
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| Autor: | Rölver, R. ⁎, Winkler, O., Först, M., Spangenberg, B., Kurz, H. |
|---|---|
| Zdroj: | In Microelectronics Reliability 2005 45(5):915-918 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect