Charging induced damage by photoconduction through thick inter metal dielectrics
Autor: | Ackaert, Jan, Bessemans, Klara, De Backer, Eddy |
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Zdroj: | In Microelectronics Reliability 2003 43(9):1525-1529 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Ackaert, Jan, Bessemans, Klara, De Backer, Eddy |
---|---|
Zdroj: | In Microelectronics Reliability 2003 43(9):1525-1529 |
Databáze: | ScienceDirect |
Externí odkaz: |