Multiphysics simulation study of thermal stress effects in nanoscale FinFETs heterogeneously integrated with GaN high-power device on silicon substrate

Autor: Duan, Huali, Li, Erping, Huang, Qinyi, Xu, Yuehang, Chen, Wenchao
Zdroj: In Microelectronics Journal August 2024 150
Databáze: ScienceDirect