Multiphysics simulation study of thermal stress effects in nanoscale FinFETs heterogeneously integrated with GaN high-power device on silicon substrate
Autor: | Duan, Huali, Li, Erping, Huang, Qinyi, Xu, Yuehang, Chen, Wenchao |
---|---|
Zdroj: | In Microelectronics Journal August 2024 150 |
Databáze: | ScienceDirect |
Externí odkaz: |