Simulation study of lateral CEFT logic performance at 3 nm Node
| Autor: | Wen, Guanguo, Long, Qiang, Shi, Xinlong, Wang, Ying, Liu, Feng, Hu, Huiyong, Zhang, Jincheng |
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| Zdroj: | In Microelectronics Journal September 2023 139 |
| Databáze: | ScienceDirect |
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