Characterization analysis of quality factor, electro-mechanical coupling and spurious modes for AlN Lamb-wave resonators with fs> 2 GHz
| Autor: | Lv, Shitao, Zhu, Zheng, Long, Fei, Sun, Haiyan, Song, Chenguang, Zhang, Aoyu, Tan, Fazeng, Zhao, Jicong |
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| Zdroj: | In Microelectronics Journal July 2022 125 |
| Databáze: | ScienceDirect |
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